24

Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas

Year:
2003
Language:
english
File:
PDF, 354 KB
english, 2003
26

Ion energy distribution functions of vacuum arc plasmas

Year:
2003
Language:
english
File:
PDF, 383 KB
english, 2003
33

Joint functioning of a magnetron sputtering system and an end-hall ion source

Year:
2014
Language:
english
File:
PDF, 993 KB
english, 2014